Precision Surface Shape Measurement of Transparent Plate Using Wavelength- Tuning Interferometry
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Published:2023-04-30
Issue:4
Volume:47
Page:331-336
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ISSN:1226-4873
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Container-title:Transactions of the Korean Society of Mechanical Engineers - A
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language:en
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Short-container-title:KSME-A
Author:
Kim Hwan,Jeon Jurim,Kim Yangjin
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering