Surface Profiling of Silicon Wafers Using Harmonic Phase-Iterative Analysis and Wavelength-Tuning Interferometry
-
Published:2022-06-30
Issue:6
Volume:46
Page:619-628
-
ISSN:1226-4873
-
Container-title:Transactions of the Korean Society of Mechanical Engineers - A
-
language:en
-
Short-container-title:KSME-A
Author:
Kim Sungtae,Kim Yangjin
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering