Development of a Surface Acoustic Wave Measurement System Using Laser-ultrasound and Its Application to Elastic Property Evaluation of Thin-films
-
Published:2022-03-31
Issue:3
Volume:46
Page:241-247
-
ISSN:1226-4873
-
Container-title:Transactions of the Korean Society of Mechanical Engineers - A
-
language:en
-
Short-container-title:KSME-A
Author:
Kim Yun-Young,Lee Jeongmyung,Jo Changhoon
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering