Simulator of Integrated Single-Wafer Processing Tools with Contingency Handling
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Published:2005-01-01
Issue:1
Volume:29
Page:96-106
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ISSN:1226-4873
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Container-title:Transactions of the Korean Society of Mechanical Engineers A
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language:en
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Short-container-title:Transactions of the Korean Society of Mechanical Engineers A
Author:
Kim Woo Seok,Jeon Young Ha,Lee Doo Yong
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering