Mechanism and Control of Reaction Force Compensation of XY Linear Motion Stage System
Author:
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A high-speed, short-stroke xy-stage with counterbalance mechanisms for highly focused laser machining;Microsystem Technologies;2022-07-29
2. A variable stiffness mechanism for a movable magnet track of a linear motor stage;Journal of Mechanical Science and Technology;2017-11
3. Semi-active reaction force compensation for a linear motor motion stage;International Journal of Precision Engineering and Manufacturing;2016-07
4. Eddy current damper for passive reaction force compensation of a linear motor motion stage;Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering;2016-06-17
5. Eddy current damper type reaction force compensation mechanism for linear motor motion stage;International Journal of Precision Engineering and Manufacturing-Green Technology;2016-01
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