EFFECTIVE METHODS OF SYNTHESIS AND OPTIMIZATION OF A HOLOGRAPHIC MASK-Reference-Cited by-同舟云学术

EFFECTIVE METHODS OF SYNTHESIS AND OPTIMIZATION OF A HOLOGRAPHIC MASK

Published:2023-09-01 Issue:1 Volume:512 Page:44-50
ISSN:2686-7400
Container-title:Доклады Российской академии наук. Физика, технические науки
language:
Short-container-title:Doklady Rossijskoj akademii nauk. Fizika, tehničeskie nauki

Author:

Chernik V. V.¹

Affiliation:

1. Ishlinsky Institute for Problems in Mechanics of the Russian Academy of Sciences

Abstract

The paper presents several statements of the problems of synthesis of holographic mask in the form of optimization problems for quality of holographic images. An effective algorithm for the synthesis of holographic masks based on FFT with complexity O(NlnN), where N is the number of elements of the depicted object, is described. Based on this algorithm, a scalable software package has been developed and implemented that allows synthesizing holographic masks for various lithography applications, including the production of MEMS, MOEMS and high-end chips. Experimental results are presented.

Publisher

The Russian Academy of Sciences

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