Thermodynamic Modeling and Experimental Implementation of the Synthesis of Vanadium Oxide Films-Reference-Cited by-同舟云学术

Thermodynamic Modeling and Experimental Implementation of the Synthesis of Vanadium Oxide Films

Published:2023-05-01 Issue:5 Volume:68 Page:651-657
ISSN:0044-457X
Container-title:Журнал неорганической химии
language:
Short-container-title:Žurnal neorganičeskoj himii

Author:

Shestakov V. A.¹²,Seleznev V. A.³,Mutilin S. V.³,Kichay V. N.¹,Yakovkina L. V.¹

Affiliation:

1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences

2. Novosibirsk State University of Architecture and Civil Engineering

3. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences

Abstract

The paper describes the thermodynamic modeling and experimental study of the synthesis of vanadium oxide films at various temperatures from the tetrakis(ethylmethylaminovanadium) V[NC3H8]4 precursor in the presence of oxygen in an argon atmosphere. The thermodynamic modeling was carried out using the calculation of chemical equilibria based on the minimization of the Gibbs energy of the system. In the experimental part of the paper, the films were synthesized by the atomic layer deposition procedure. The thermodynamic modeling and experimental results agree with each other and can be used to develop procedures for the synthesis of film coatings based on vanadium oxides.

Publisher

The Russian Academy of Sciences

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