Structuring of the Surface of Thin Carbon Films During Activation by Microsecond Current Pulses-Reference-Cited by-同舟云学术

Structuring of the Surface of Thin Carbon Films During Activation by Microsecond Current Pulses

Published:2024-07-17 Issue:1 Volume:53 Page:8-15
ISSN:0544-1269
Container-title:Микроэлектроника
language:
Short-container-title:Mikroèlektronika

Author:

Nefedov D. V.¹,Shabunin N. O.²,Bratashov D. N.²

Affiliation:

1. Saratov Branch of Kotelnikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences

2. Saratov State University

Abstract

The influence of current activation by electric pulse breakdown on changes in surface morphology and emission characteristics of a field emission cathode made on the basis of carbon films obtained by deposition in a microwave gas discharge plasma was studied. Current activation of these films was carried out by applying voltage pulses of microsecond duration until an electrical breakdown occurred. It is shown that during activation, the morphology of the film surface in the breakdown region changes with the formation of a micro-sized emitting structure, which significantly improves the field emission characteristics of cathodes based on carbon films.

Publisher

The Russian Academy of Sciences

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