Structure of silicon/oxide and nitride/oxide interfaces
Author:
Publisher
Uspekhi Fizicheskikh Nauk (UFN) Journal
Subject
General Physics and Astronomy
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Attenuated Total Reflection Spectra of Nitrided SiO2/Si Structures;Journal of Applied Spectroscopy;2022-09
2. SPECTRA OF ATTENUATED TOTAL REFLECTION OF NITRIDED SiO2/Si STRUCTURES;Journal of Applied Spectroscopy;2022-07-20
3. Influence of nitrogen ion implantation on the electrophysical properties of the gate dielectric of power MOSFETs;Journal of the Belarusian State University. Physics;2020-10-07
4. Features of changes in optical response within the surface oxide layer in Si and GaAs;Bulletin of Taras Shevchenko National University of Kyiv. Series: Physics and Mathematics;2018
5. Three-Component Model of an Effective Medium for Determining the Composition of Layers on Silicon Wafers;Journal of Applied Spectroscopy;2017-11
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