Approaches to determining curvature of wafers by their topography-Reference-Cited by-同舟云学术

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Approaches to determining curvature of wafers by their topography

Published:2021-10 Issue: Volume: Page:
ISSN:1063-7869
Container-title:Physics-Uspekhi
language:en
Short-container-title:Phys. Usp.

Author:

Dedkova Anna A.¹,Florinsky Igor V.²,Djuzhev Nikolai A.¹

Affiliation:

1. National Research University of Electronic Technology (MIET), sq. Shokina 1, Zelenograd, Moscow, 124498, Russian Federation

2. Institute of Mathematical Problems of Biology, Keldysh Institute of Applied Mathematics, Russian Academy of Sciences, Prof. Vitkevich str. 1, Pushchino, Moscow Region, 142290, Russian Federation

Publisher

Uspekhi Fizicheskikh Nauk (UFN) Journal

Subject

General Physics and Astronomy

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Technique for Investigation of the Shape Changes of Wafers and Thin-Film Membranes by Using Geomorphometric Approaches;Technical Physics;2024-02

2. Analysis and Classification of Biomedical and Bioinformation Systems Using a Generalized Spectral Analytical Approach;Pattern Recognition and Image Analysis;2023-12

3. Study of Topographic Features, Shape, and Mechanical Stresses in Microelectronic Structures Using Geomorphometric Techniques;Russian Microelectronics;2023-12

4. Geomorphometry and microelectronic metrology: Converged realms;Transactions in GIS;2023-07-25

5. Geomorphometric modeling of nanotopography using data from atomic force microscopy;Proceedings of the International Conference "Mathematical Biology and Bioinformatics";2022-10-27

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