Particle Adhesion to Solid Surfaces

Abstract

This review paper provides cleanroom technologists with an up-to-date overview on the subject of particle adhesion to solid surfaces. The discussion consists of four sections: (1) fundamental concepts of adhesion, (2) the nature of a solid surface, (3) the physical properties of particles, and (4) comments on the various theories of particle adhesion to solid surfaces. Some practical examples are also cited. A numeric example of adhesive forces as a function of particle size is presented in detail. The appendix contains references to other useful sources of information in the technical literature.