Моделирование отражающих характеристик пористого и черного кремния

Abstract

The results of FDTD modelling of the spectral reflection characteristics of periodic systems with unit cells in the form of cylinders and cones, which correspond to the morphologies of porous and black silicon layers, are presented. The antireflection behavior of these systems with a characteristic size on the order of several hundreds of nanometers is analyzed. The features of reflection depending on the geometric parameters of unit cells and the angle of incidence of light rays are investigated. It is shown that periodic systems with cones are superior in antireflection properties to systems with cylinders.