New Trend of Sensing Technology

Author:

YAMASAKI Hiro1

Affiliation:

1. Faculty of Engineering, The University of Tokyo, now Professor Emeritus, Yokogawa Electric Corporation

Publisher

Iron and Steel Institute of Japan

Subject

Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics

Reference8 articles.

1. 1) R.A. Breckenridge and C. Husson : Smart Sensors in Spacecraft, The Impact and Trends, Proc. AIAA/NASA Conference on Smart Sensors, Hamton, (1978), p.1

2. 3) S. Sugiyama et al. : Integrated Piezoresistive Pressure Sensors with Voltage & Frequency Output, TRANSDUCERS '83, (1983), p.115

3. 4) W.H. Ko et al. : Capacitive Pressure Transducers with Integrated Circuits, Sensor & Actuators, 4 (1983), p.403

4. 5) I. Lauks, J. Van der Spiegel, W. Sansen and M. Steyaert : Multispecies Integrated Electrochemical Sensor with Onchip CMOS Circuitry, Digest of Technical Papers, TRANSDUCERS '85, Philadelphia, (1985), p.122

5. 6) R. Muller and E. Lange : Multidimensional Sensor for Gas Analysis, Sensors & Actuators, 9 (1986) 1, p.39

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