Development of nano-meter motion control in Japan-Reference-Cited by-同舟云学术

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Development of nano-meter motion control in Japan

Published:2002-11 Issue:4 Volume:24 Page:312-317
ISSN:0100-7386
Container-title:Journal of the Brazilian Society of Mechanical Sciences
language:
Short-container-title:J. Braz. Soc. Mech. Sci.

Author:

Shimokohbe Akira¹

Affiliation:

1. Tokyo Institute of Technology, Japan

Publisher

FapUNIFESP (SciELO)

Subject

General Medicine

Reference10 articles.

1. Giant Magnetostriction Actuator of Laminated Plate Type;Eda H.;Journal of JSPE,1995

2. Precision Positioning by Steel Belt Drive Mechanism;Fujisaki M.;Proceedings of JSME Domestic Conference,1995

3. High Precision Step-and-scan Stage Technology;Fukuda Y.;Journal of JSPE,1998

4. Development of High Speed Nanometer Positioning Table System and its Performance Evaluation;Hashizume H;Transaction of JSME,1998

5. Precision Positioning by Friction Driving System;Kawamura M.;Proceedings of JSME Domestic Conference,1994

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of surface functional parameters on friction behavior and elastic–plastic deformation of grinding surface in mixed lubrication state;Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology;2018-10-26

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