Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputtering-Reference-Cited by-同舟云学术

Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputtering

Published:2015-10-23 Issue:suppl 2 Volume:18 Page:30-34
ISSN:1980-5373
Container-title:Materials Research
language:
Short-container-title:Mat. Res.

Author:

Freitas Flávio Gustavo Ribeiro¹,Hübler Roberto²,Soares Gabriel³,Conceição Amanda Gardênia Santos¹,Vitória Edson Reis¹,Carvalho Renata Gomes¹,Tentardini Eduardo Kirinus¹

Affiliation:

1. Universidade Federal de Sergipe, Brazil

2. Pontifícia Universidade Católica do Rio Grande do Sul, Brazil

3. Universidade Federal do Rio Grande do Sul, Brazil

Publisher

FapUNIFESP (SciELO)

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://www.scielo.br/pdf/mr/v18s2/1516-1439-mr-1516-1439336214.pdf

Reference23 articles.

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2. Effect of Si incorporation on the properties of niobium nitride films deposited by DC reactive magnetron sputtering;Benkahoul M;Surface and Coatings Technology,2004

3. Industrial applications of superhard nanocomposite coatings;Veprek S;Surface and Coatings Technology,2008

4. Stress, interfacial effects and mechanical properties of nanoscale multilayered coatings;Abadias G;Surface and Coatings Technology,2007

5. Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering;Lee J;Transactions of Nonferrous Metals Society of China,2009

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