Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor
Author:
Affiliation:
1. Iran University of Science and Technology, Iran
2. Iran University of Science and Technology, Iran; University of Science and Technology, Iran
Publisher
FapUNIFESP (SciELO)
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
http://www.scielo.br/pdf/mr/v17n6/37.pdf
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3. Synthesis of TiN/TiCN/TiC layer systems on steel and cermet substrates by PACVD;Rie KT;Surface and Coatings Technology,1995
4. How TiN coatings improve the performance of high speed steel cutting tools;Hedenqvist P;Surface and Coatings Technology,1990
5. Structure and properties of TiN coatings;Sundgren JE;Thin Solid Films,1985
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