Carbon Implanted in Optical Grade Fused Silica: Annealing Effects in Reducing and Oxidizing Atmospheres

Abstract

AbstractCarbon is implanted into fused silica with doses of 1, 3, 6, 10×1016 ions/cm2. Infrared spectroscopy has identified the formation of CO and CO2 molecules in the implanted glasses. The relationships among concentrations of carbon dioxide, carbon monoxide and carbon doses are established by the infrared measurements. Annealing under different atmospheres have dramatic effects on CO and CO2 concentrations.