Hybrid Tomography of Nanostructures in the Electron Microscope

Abstract

AbstractA variety of tomographic experiments and modes for electron tomography of nanostructures are introduced, derived from the general concepts of quantitative computed tomography, binarised geometric tomography, including shape-from-silhouette, and spectroscopic chemical mapping. Our emphasis is on working out concepts of combining at least two of these tomography modes in order to share their respective advantages and improve the overall reconstruction quality. In this work, the following three hybrid modes are presented: (i) ADF-STEM tomography and EDX tomography into high-resolution 3D chemical mapping, (ii) geometric tomography and lattice-resolved backprojection into HREM-tomography for convex bodies, and (iii) geometric tomography and e-beam nanosculpting into “tomographic nanofabrication”.