Defects Induced by Electron Bombardment and Substrate Doping in SiO2 Thin Films

Abstract

ABSTRACTThin SiO2 films grown on silicon substrates were exposed to electron beam irradiation at energies from 100 eV to 2.5 KeV. Then, thermally stimulated exoelectron emission (TSEE) spectra were taken by heating the sample linearly to a maximum temperature of 600°C. We have compared the emission behavior from oxides grown on both n-typeand p-type, (100) and (111) silicon wafers. The TSEE spectra show emission peaks whichcan be categorized by their behavior into two groups. The β emission peaks are characteristic of emission from localized electron traps while the γ emission peaks result from the annealing of beam-induced defects. We have observed changes in the β peaks which appear to be associated with the concentration of dopants in the substrate material. In addition, we have identified a beam energy threshold near the oxygen Is binding energy for the creation of defects. This suggests that defect creation results froman electronic transition similar to electron stimulated desorption.