Spuiter Deposition of Lithium Silicate — Lithium Phosphate Amorphous Electrolytes

Abstract

AbstractThin films of an amorphous lithium-conducting electrolyte were deposited by rf magnetronsputtering of ceramic targets containing Li4SiO4and Li3PO4. The lithium content of the films was found to depend more strongly on the nature and composition of the targets than on many other sputtering parameters. For targets containing Li4SiO4, most of the lithium was found to segregate away from the sputtered area of the target. Codeposition using two sputter sources achieves a high lithium content in a controlled and reproducible film growth.