A Thin Film Solid State Nicrobattery for Use in Powering Nicrosensors

Abstract

AbstractA thin film solid state microbattery has been used to power an O2 microsensor. The microbattery was fabricated using RF magnetron sputtering for the solid oxide/sulfide electrolyte and the TiS2 cathode. Vacuum evaporation was used for the deposition of LiI and Li anode. rhe microbattery is approximately 10 µm in thickness. The microbattery has an OCV of 2.4-2.5 V and shows close to 100% utilization to a 1.8 V cutoff when discharged between 10 and 135 µA/cm2. The microbattery is capable of supplying 2 second pulses of greater than 2 mA/cm2. The microbattery is rechargeable with over 200 cycles of 70% utilization to a 1.8 V cutoff at current densities up to 135 µA/cm2.The O2 microsensor consists of a silk-screened Au working and Ag electrode. The Ag electrode was anodized to provide an Ag/AgCl counter electrode. The current produced at the sensor is proportional to the dissolved O2 concentration of an aqueous solution upon application of 0.6 V between the two electrodes.