A New Technique for Measuring Poisson's Ratio of Mems Materials-Reference-Cited by-同舟云学术

A New Technique for Measuring Poisson's Ratio of Mems Materials

Published:1996 Issue: Volume:444 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Sharpe W. N.,Vaidyanathan K. R.,Yuan Bin,Edwards R. L.

Abstract

AbstractNew techniques and procedures for measuring Poisson's ratio of MEMS materials are presented. Tensile specimens of polysilicon that are 3.5 μm thick are pulled in a small test machine that has a linear air bearing to eliminate friction. Biaxial strain is measured directly by laser-based interferometry from four gold lines deposited on the specimen surface. The value of Poisson's ratio for vapor-deposited polysilicon is 0.22 +/- 0.01 as determined from 19 tests..

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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