Author:
Takagi N.,Eshita T.,Miyagaki S.,Kimura M.,Takasaki K.
Abstract
ABSTRACTA low temperature preheating process is developed for metalorganic chemical vapor deposition (MOCVD) growth of GaAs on wet chemical pretreated Si substrates. NH4 OH/H2 O2 is found to be most effective in decreasing the preheating temperature among the chemicals we tried: NH4 OH/H2 O2, H2SO4 /H2O2, or hot HNO3. By using NH4OH/H2 O2, the preheating temperature is reduced from 1000°C to 875°C. X-ray diffraction measurements and surface observations with an atomic force microscope (AFM) show that the GaAs film quality obtained with the 875 °C preheating process is better than that obtained with 1000°C preheating.
Publisher
Springer Science and Business Media LLC
Cited by
2 articles.
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