Sequence Of Phase Formation In Ni/Ai Contrasted With Ni/Si

Abstract

ABSTRACTWe have investigated the interactions of Al/Ni, NiAl3/Ni, and Ni2Al3/Ni thin films between 350 and 500°C. Sequential layer deposition and coevaporation were used to prepare the films which were then vacuum annealed and analyzed by Rutherford backseat tering and X-ray diffraction. Initially, NiAl3 is formed, followed by the more Ni-rich phases. All four intermetallic phases were formed.