Formation and Properties of Porous Si Superlattices

Abstract

ABSTRACTPorous silicon superlattices (PS-SL) were investigated by transmission electron microscopy (TEM), scanning electron microscopy (SEM), spectroscopic ellipsometry and reflectance spectroscopy. Type I superlattices were formed by periodically changing the current density during the etch process. The quality of the interface between layers of different porosity depends on the quality of the silicon substrate. Optical components such as Bragg reflectors or Fabry-Perot filters were designed using the optical data of single porous layers. A good long term stability of the layers is achieved by using thermal oxidation steps. Type II superlattices were formed on substrates with layers of alternating doping level. The more complex layer structure of these superlattices is explained by the selectivity of the etch process on the doping level.