Applications of Polysilicon Films in Microsensors and Microactuators-Reference-Cited by-同舟云学术

Applications of Polysilicon Films in Microsensors and Microactuators

Published:1987 Issue: Volume:106 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Howe Roger T.

Abstract

ABSTRACTThis paper reviews the applications of polysilicon in microsensor technology and in the emerging field of microfabricated actuators. Polysilicon is an attractive material for thin-film strain gauges, and is also used to fabricate micromechanical structures. The need for better understanding of the non-electrical properties of polysilicon, such as Young's modulus, residual strain, ultimate strength, friction, and wear, is emphasized.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference45 articles.

1. 44. Fujita H. and Omodaka A. , Technical Digest, IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, Nov. 1987.

2. 42. Gabriel K. J. , Trimmer W. S. N. , and Mehregany M. , Technical Digest, Int. Conf. on Solid-State Sensors and Actuators, Tokyo, Japan, 853 (1987).

3. 41. Fan L.-S. , Tai Y.-C. , and Muller R. S. , Technical Digest, Int. Conf. on Solid-State Sensors and Actuators, Tokyo, Japan, 849 (1987).

4. 35. Sugiyama S. , Kawahata K. , Abe M. , Funabashi H. , and Igarashi I. , Technical Digest, Int. Conf. on Solid-State Sensors and Actuators, Tokyo, Japan, 444 (1987).

5. 28. Howe R. T. , Technical Digest, Int. Conf. on Solid-State Sensors and Actuators, Tokyo, Japan, 845 (1987).

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of Stochastically Heterogeneous Microbeams by a Functional Perturbation Method;Continuum Models and Discrete Systems;2004

2. Analysis of Bernoulli beams with 3D stochastic heterogeneity;Probabilistic Engineering Mechanics;2003-10

3. Structural and mechanical characterization of in-situ phosphorus-doped rapid transport low pressure chemical vapor deposition polycrystalline silicon films;Microelectronics Journal;1999-07

4. Repetitive impact testing of micromechanical structures;Sensors and Actuators A: Physical;1993-09

5. Effect of boron implantation on the structure and residual stress of LPCVD polysilicon films;Journal of Micromechanics and Microengineering;1992-09-01