Abstract
ABSTRACTIn this paper, the use of corona discharges to investigate and monitor surface ion failure mechanisms in devices is reviewed. The physical mechanisms resulting in surface ioninduced failures are first described. Then, some of the traditional design features and testing methods to minimize these failures are summarized. After presenting the general features of surface charge deposition on devices by a corona discharge, several examples of the application of this technique for design verification, process improvement and control, and failure analysis are given.
Publisher
Springer Science and Business Media LLC
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