Author:
Hayakawa Issei,Iwamoto Yuji,Kikuta Ko-ichi,Hirano Shin-ichi
Abstract
A metalorganic precursor containing Ti and Pt was synthesized using Ti alkoxide derivative, amino acid, and platinum salt. The decomposition behavior of the precursor and thin-film formation were examined in terms of microstructure evolution and crystallization. The precursor yielded anatase at 400 °C. Grain growth of platinum particles and TiO2 grains was suppressed even at 800 °C in the films. Suppression of grain growth was attributed to an effect of film thickness.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
4 articles.
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