Author:
Sayama Hirokazu,Kishimoto Takehisa,Takai Mikio,Kimura Hiroshi,Ohno Yoshikazu,Sonoda Ken-Ichiro,Kotani Norihiko,Satoh Shin-Ichi
Abstract
ABSTRACTThe charge collection efficiency of a diode with a retrograde well was estimated using focused ion beam irradiation at 400 keV and 2 MeV. The retrograde well was found to effectively suppress a collection of charge carriers created by energetic particles. The charge collection efficiency of the diode with the retrograde well was ~ 25 % lower than that with the conventional well when 400 keV ~ 2 MeV protons were irradiated normal to diodes. This result was in good agreement with device simulation.
Publisher
Springer Science and Business Media LLC