Calculation of Intrinsic Stresses and Elastic Moduli in Nonhomogeneous Thin Films

Abstract

AbstractAn approach is presented for the determination of the residual stresses and elastic moduli of particle systems resulting from computer simulations of particle or atomic deposition. The proposed technique is based on fundamental concepts of elasticity and is capable of capturing the variation of stresses and moduli as functions of position within the system. Application to a simple particle system consisting of a deposited thin film is demonstrated.