Application of Holographic Interferometry to Flow Pattern Visualization in an RTCVD Reactor

Abstract

AbstractThis paper presents the development of an experimental technique for the reception of holographic interferograms of H2 and Ar flows in a RTCVD reactor with a complex geometry. The obtained holographic patterns were analyzed for the reconstruction of the gas flow in the RTCVD reactor. The fringe patterns showing the gas density distributions were recalculated into temperature distributions. Experimental results were compared with the predicted flow field.