UV Photoannealing and RTP of Thin Sol-Gel Films-Reference-Cited by-同舟云学术

UV Photoannealing and RTP of Thin Sol-Gel Films

Published:1996 Issue: Volume:429 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Leest R. E.Van de,Roozeboom F.

Abstract

AbstractVarious annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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