Author:
Tamura Nobumichi,Chung J.-S.,Ice G. E.,Larson B. C.,Budai J. D.,Tischler J. Z.,Yoon M.
Abstract
AbstractThe local strain and texture in Al interconnect wires have been investigated using white and monochromatic x-ray microbeams on the MHATTCAT undulator beam line at the Advanced Photon Source. Intergrain and intragrain orientations were obtained with ∼0.01° sensitivity using white beam measurements on wide Al pads (∼100 μm) and thin (2 μm) Al wires. Orientation changes of up to 1°were found within individual grains of the (111) textured Al interconnects. Deviatoric strain measurements indicate small intragranular strain variations, but intergranular strain variations were found to be quite large.
Publisher
Springer Science and Business Media LLC
Cited by
36 articles.
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