Technique for Monitoring the Etching Rate of Alumina

Abstract

AbstractThe effect of chemical and thermal treatments on the grains and grain boundaries of polycrystalline μ-Al2O3has been examined using a combination of microscopy techniques. Commercially available alumina samples (Lucalox™) were chemically etched in phosphoric acid at 200°C in increments of 15 min. Thermal treatments were carried out at 1650°C before chemical treatments. Using maps obtained by visible-light microscopy (VLM) as a guide, the same regions were re-examined using atomic force microscopy (AFM) after subsequent treatments. Variations in the dissolution rates of different grains and grain boundaries could then be studied using AFM. The geometry of the grain-boundary grooves was compared after thermal and chemical treatments. Electron backscattered diffraction (EBSD) patterns recorded in the scanning electron microscope (SEM) were used to obtain crystallographic orientations of the grains which enabled variations in dissolution rates between grains to be correlated to orientation.