A New Self-Aligned A-SI TFT Using Ion Doping and Chromium Silicide Formation

Abstract

ABSTRACTA new self-aligned a-Si TFT has been developed. Ion doping and chromium silicide (CrSix) formation technique was used to fabricate source and drain, which are self-aligned to the gate electrode, instead of using the previously reported lift-off process. The fabricated TFT mobility is about 0.5cm2/V' sec and threshold voltage is about 3V. The ON/OFF ratio is over 106. The actions of as short as 2μm channel TFT have been confirmed, using a large area TFT process. These results show that this technique can be applicable to manufacturing high quality TFT-LCDs in a large area.