Film Deposition Process in Pulse Discharge CVD

Abstract

ABSTRACTTo understand the deposition process of pulse discharge (PD) CVD, we studied spatial distribution and decay of plasma parameters and those of SiH LIF signals. In addition, we studied film properties of a-SiC:H and a-SiGe:H deposited by the PD-CVD. It was found that the quality of p-type a-SiC:H films deposited by the PD-CVD from SiH4+CH4+B3 was better than those of conventional p-type a-SiC:H films. The p-type a-SiC:H films were applied to the p-layer of p-i-n a-Si solar cells, and a conversion efficiency of 12. 3% was obtained for a 1cm2.