Microstructural studies of boron nitride films deposited by microwave plasma-assisted chemical vapor deposition by using trimethyl borazine precursor

Abstract

Thin films of cubic boron nitride (c-BN) were synthesized using an organometallic precursor trimethylborazine (TMB) which contains both boron and nitrogen in 1 : 1 stoichiometric ratio. The films were deposited at different temperatures ranging from 300 to 500 °C at a pressure of 2 Torr and at 360 W microwave power, using N2 as carrier gas. The deposited films were characterized by Fourier transform infrared spectroscopy (FTIR), x-ray diffraction (XRD), and scanning electron microscopy (SEM), which reveal the presence of amorphous BN and crystalline c-BN in varying proportions. The x-ray diffraction pattern of the deposited films showed a strongest peak at 2θ = 57.1° where the interplanar distance value, d = 2.06 Å, agreed well with the (111) crystallographic orientation of c-BN phase.