Synthesis of single phase YBa2Cu3O7−x thin films from a Y-Ba-Cu metallic precursor by a low-temperature annealing

Abstract

YBa2Cu3O7−x (YBCO) superconducting thin films that show no x-ray diffraction peaks due to any other non-superconducting phases have been synthesized by annealing Y-Ba-Cu-O amorphous precursors at 750 °C. The Y-Ba-Cu-O precursors have been fabricated by oxidizing Y-Ba-Cu metallic precursors coevaporated from Y, Ba, and Cu metallic sources under ultrahigh vacuum conditions. Crystallization behavior from the Y-Ba-Cu-O precursor to YBCO films drastically depends on an oxidation temperature for the Y-Ba-Cu metallic precursor. YBCO thin film synthesized from the precursor oxidized at an optimum temperature shows a zero resistance temperature of over 80 K and a very smooth surface.