Mechanical Properties of Pyrolytic "SiOCN" Thin Coatings

Abstract

ABSTRACTPyrolysis of polymer precursors (polysilazane) is a technologically and economically interesting way to produce thin ceramic coatings. However, many cracks appear and decohesion occurs during pyrolysis when the ceramic coatings (SiOCN) are thicker than 0.5 micrometers. In order to understand these cracking phenomena, the coatings are mechanically characterized by nanoindentation at different stages of the pyrolysis heat treatment.During pyrolysis, the cracking temperature is detected by in-situ optical observation. The thickness of the coatings varies during pyrolysis from 3 micrometers at the polymeric state to 1 micrometer at the ceramic state. The coatings' properties, hardness and Young's modulus are evaluated after heat treatment, taking into account the substrate's influence. A large variation of these properties occurs at the cracking temperature. Both the hardness and the Young's modulus are multiplied by a factor of 10. By analysing these results, we show that cracking is correlated with the evolution of the coatings' mechanical properties during the transformation.