Laser-assisted chemical vapor deposition of carbon coated cobalt nanoparticles

Abstract

AbstractCarbon coated nanoparticles were synthesized by laser-assisted (ArF excimer laser, λ = 193 nm) chemical vapor deposition (LCVD). The particles were formed in the gas-phase by photolytic dissociation of cobaltocene in argon and the particles were deposited onto a silicon substrate. The particles were deposited at two different laser fluencies, 70 and 300 mJ/cm2.Single crystalline spherical cobalt particles with a well-defined carbon shell were observed by transmission electron microscopy (TEM) for the highest fluence, 300 mJ/cm2. The metallic nucleus phase were identified as either β-Co or Co3O4. Polycrystalline particles were deposited at 70 mJ/cm2, these particles contained α-Co, β-Co, CoO and Co3O4. The particles deposited at 300 mJ/cm2 were log-normally distributed and the total diameter had a mean geometric size of 25 nm while the nuclei had a mean diameter of 10 nm. X-ray photoelectron spectroscopy (XPS) measurements showed that the particles had a carbon content roughly ten times the amount of cobalt. Sputtering showed that both cobalt oxide and metallic cobalt was present. HRTEM micrographs of the particles revealed that only one phase was present in the whole nucleus, proving the nuclei were either oxide or metallic. Raman spectroscopy showed that that the carbon shell contained mostly amorphous carbon. Small domains of carbon of more graphitic character was embedded in the amorphous carbon shell in the 300 mJ/cm2 sample.