Decomposition and Impurity Analysis of Organotellurium Precursors for MOVPE

Abstract

ABSTRACTThis paper discusses the application of gas chromatography-mass spectroscopy (GC-MS) to the assessment of precursors for the MOVPE growth of (Hg,Cd)Te. GC-MS has been used to analyse precursors for volatile organic and organometallic impurities. An extension of the technique has also allowed precursor decomposition reactions and interactions to be studied. Information obtained on alkyl purity, decomposition and interactions has been shown to be of direct relevance to the optimisation of growth.