Author:
Demin A.,Vodchits V.,Eltzov A.,Kristoforov O.,Kirukhin Yu.,Vinokhodov A.,Borisov V.,Osmanov R.,Bragin I.,Vogler K.,Rebhan U.,Rahe M.,Stamm U.,Basting D.
Abstract
AbstractThis paper reviews the results of the development of high power (up to 1 kW), high energy (up to 10J) prototypes of excimer lasers that are of interest to meet expanding requirements of the electronic industry. Some experimental characteristics are presented for various excimer prototypes operating at the important wavelength of 308nm (XeCl). Keywords: Excimer laser, average power, output energy, annealing
Publisher
Springer Science and Business Media LLC
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