Rapid Preparation of Cross-Sectional TEM Samples from Electroplated Copper

Abstract

ABSTRACTMethods were investigated for the rapid preparation of cross-sectional TEM samples from electroplated copper. Electropolishing and ultramicrotomy were used. The electropolished samples were sandwiched in a copper/nickel alloy and electropolished using a nitric acid/methanol mixture. Large transparent areas were obtained and it was possible to position the area of interest at the point where the hole would appear. Ultramicrotomed samples cut with 45° diamond knives were electron transparent but the crystalline structure of the sample was severely damaged. However, it was possible to identify the conditions by which good ultramicrotomed samples might be produced in the future.