A Comparison Between Energetics of Decomposition and Photo-Deposition of Pd and Pt from Pd(C5 H5 )(C3 H5) and Pt(C5H5)(C3 H5)

Abstract

ABSTRACTThe energetics of decomposition of a variety of organometallic compounds have been determined from photoionization mass spectroscopy and electron impact mass spectroscopy. In particular, Pd(C5H5)(C3H5) and Pt(C5H5)(C3H5) have been studied in this fashion, and the information used to make patterned Pd/Ni/Si heterostructures by laser induced photolysis of the palladium compound and nickelocene in vacuum (MOCVD). Contamination in the thin films was determined by Auger electron spectroscopy, and compared with that found by other researchers for photo-deposition of Pt from the cyclopentadiene allyl [1].Thermodynamic data is used to explain differing contamination levels in the Pd and the Pt coatings.