Metallurgical Behavior of the Metal-IN-P Systems: Implications for the Design of Contacts to Inp

Abstract

ABSTRACTPhase equilibria in the M-In-P (M = transition metal) ternary systems is determined through a combination of thermodynamic calculation and experimentation. Palladium is identified as a particularly attractive metal for contacts to InP. One useful feature of this system for contact design is the occurance of PdχInP ternary phases. Additionally, Pdln is found to be in equilibrium with InP and is identified as a promising contact material to InP because of its high melting point, low resistivity, and favorable properties for processing. Progress in the development of Pdln-based contacts to InP is briefly discussed.