Prospects for Active Matrix Displays on Plastic-Reference-Cited by-同舟云学术

Prospects for Active Matrix Displays on Plastic

Published:1997 Issue: Volume:467 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Gates Stephen M.

Abstract

ABSTRACTWe review the status of active matrix display fabrication on plastic substrates, specifically active matrix liquid crystal displays (AM LCDs). Research efforts in the U.S. and Europe are surveyed. Currently available transparent plastics, and active programs to improve these materials are described. Our work on thin film transistor (TFT) fabrication at 125°C is then reported, with a comparison of reactive sputtering and plasma enhanced CVD methods.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference10 articles.

1. Plasma deposition of hydrogenated amorphous silicon: Studies of the growth surface

2. Excimer laser crystallization and doping of silicon films on plastic substrates

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