Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films using Capacitive Bridges

Abstract

ABSTRACTWe extend the method of Najafi and Suzuki [1] for the electronic determination of the modulus of elasticity and intrinsic stress of thin films using capacitive bridge structures. New theoretical concepts are introduced. The extended method does not require that the test structures be exercised to the point of snap-action.