Abstract
ABSTRACTActive and adaptive thin film materials for “smart” materials will likely be a heterostructure of several types of thin films. In this investigation, deposition and processing of thin film Shape Memory Effect TiNi and thin film ferroelectric BaTiO3 and SrTiO3 are discussed. Growth conditions as well as the thermodynamic conditions for thin films are described. It was found that amorphous thin films of TiNi and BaTiO3 can be crystallized simultaneously by air annealing at 600°C.
Publisher
Springer Science and Business Media LLC
Cited by
8 articles.
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