Characterization of Silicon Nanoparticles Prepared from Porous Silicon

Abstract

ABSTRACTNanometer sized silicon particles have been produced by ultrasonic dispersion of thin sections of porous silicon in organic solvents. High resolution TEM and FTIR have been used to establish the size range and surface structure/composition of these particles. The larger particles, which range in size from 20 to 50 nm, are made up of a conglomeration of smaller particles with a diameter of a few nanometers. The HRTEM shows an amorphous layer on the surface of many of the clusters. FTIR data suggest this amorphous layer is silicon-dioxide which may also have organic constituents.