Selective Intermixing of Ion Irradiated Semiconductor Heterostructures

Author:

Goldberg R. D.,Mitchell I. V,Piva P. G.,Tan H. H.,Jagadish C.,Poole P. J.,Aers G. C.,Charbonneau S.,Weatherly G. C.,Johnson M. B.,Gal M.,Springthorpe A. J.,Chen H.,Feenstra R. M.

Abstract

AbstractSignificant progress has been realized in the use of quantum well intermixing (QWI) as a method for tailoring the bandgap energies of optoelectronic devices. Intermixing can be driven by an ion implantation process, an approach that appeals because of its simplicity, its planarity and its adaptability to selective area processing. Despite its success, the advantages of irradiation induced QWI need to be tested further and we report here current results of three research activities which address a) the existence or not of a simple scaling relationship which connects intermixing in a given QW structure for any ion species; b) reproducibility of intermixing in identical QW structures which have been obtained from different growth systems; and c) intermixing for above the well versus through the well implantation.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference22 articles.

1. Quantum‐well intermixing for optoelectronic integration using high energy ion implantation

2. 17. Charbonneau S. , Poole P. J. , Aers G. C. , Chen H. , Feenstra R. , Piva P. G. , Goldberg R. D. and Mitchell I. V. , Physics in Canada, March/April, p. 76 (1998).

3. Polarization insensitive InGaAs/InGaAsP/InP amplifiers using quantum well intermixing

4. Damage accumulation and amorphization in GaAs-AlGaAs structures

5. 5. Koteles E. S. , Charbonneau S. , Poole P. , He J.-J. , Davies M. , Dion M. , Aers G. , Feng Y. , Mitchell I. V. and Goldberg R. D. , Physics in Canada, September/October, p. 251 (1996).

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3